On-machine fabrication of PCD and WC micro end mills using micro electro discharge machining
نویسندگان
چکیده
منابع مشابه
Batch Mode Micromanufacturing Based on Micro Electro-discharge Machining and Micro Ultrasonic Machining for Micro Electro Mechanical Systems (mems)
Metal alloys have material properties that are very appealing for micro electro mechanical systems (MEMS), but present a challenge for process integration within a lithographic manufacturing sequence of the type used in the semiconductor industry. The batch-mode micro electrodischarge machining (μEDM) discussed here uses lithographically-fabricated electrode arrays with high density and high un...
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Advances in micromachining techniques have led to the evolution of micro-electromechanical systems (MEMS). These techniques are typically based on semiconductor manufacturing processes, which offer various advantages such as batch manufacturing of miniaturized devices and monolithic integration of microelectronics with the devices. Surface micromachining has been used to construct complex micro...
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Bio technologies, electronic components, MEMS or watch industry require handling and positioning of ever smaller micro-parts (ten to hundred μm size). Several tools used for such tasks, called micro-grippers have been developed based on different catching and releasing principles. Vacuum grippers are mainly used in the macro world and have been successfully downsized to fulfill micro-world appl...
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This paper discusses the fabrication of microfluidic channels using micro end milling and micro electrical discharge (ED) milling on metals and polymers. The width of the microchannels fabricated by micro end milling was 100-800 μm with 1-2 aspect ratio. The average surface roughness values were 100-200 nm and 80-120 nm on metals and polymers respectively. The end milling was found to form more...
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Recent trend in reducing the size of products has given Micro Electrical Discharge Machining (MEDM) a significant amount of research attention. Due to the high precision, low tolerance and good surface quality that it can deliver, MEDM is potentially an important process for fabrication of micro-tools, micro-components and parts with micro-features. This paper briefs and highlights the various ...
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ژورنال
عنوان ژورنال: International Journal of Mechatronics and Manufacturing Systems
سال: 2014
ISSN: 1753-1039,1753-1047
DOI: 10.1504/ijmms.2014.067166